Graphene synthesis on electrodeposited substrates and its integration in MEMS for sensor applications

The synthesis of graphene on dealloyed NiCu is reported. The existence, thickness, and quality of the graphene films are discussed based on their Raman spectra. The growth of graphene on dealloyed NiCu is affected by the amount of copper in the alloy: a transition from graphitic to graphenic layers is observed with increasing copper content. Transfer procedures devised to integrate the graphene layers into functional devices are presented. The experimental results suggest the possibility of using this simple approach to develop new transducing materials integrated with silicon microdevices for sensing applications.