Analog SiPM in Planar CMOS Technology

Silicon Photomultipliers (SiPMs) are emerging single photon detectors used in many applications requiring large active area, photon number resolving capability and immunity to magnetic fields. We developed planar analog SiPMs in a reliable and cost-effective CMOS technology with a total photosensitive area of about 1×1 mm2. Three devices with different active areas, and fill-factor (21%, 58.3%, 73.7%), have been characterized. The maximum photon detection efficiency is in the near-UV and tops at 38% (fill-factor included), with a dark count rate of 125 kcps. Gain and crosstalk depend on the active area size and are comparable to those of commercial best-in-class custom-technology SiPMs. However our full CMOS processing enables advanced SiPM single-chip systems where transistors and further on chip electronics can be integrated together with the detectors.