In order to efficiently scale down RF circuits it is necessary also to decrease the size of the inductors. The ultimate limit of this miniaturization would be an RF circuit consisting of nano-scaled inductors. Meander nanoinductors presented in this work were fabricated by electron beam lithography. Their performance was investigated by electromagnetic simulation software. It was found that inductance and quality factor of these inductors linearly scale down with their size. Nano-inductors could offer advantages at higher frequencies because their quality factor linearly increases with frequency in the range where the quality factor of the microinductors reaches a maximum.
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