The research discusses progresses and challenges towards the performance improvement of amplitude-modulated (AM) mode-split gyroscopes fabricated in commercial 30-μ m-thick processes. From an existing 2.6 mm2 sensor with 0.1° √hr angle random walk (ARW) and 5-10° hr stability, the new architecture theoretically targets noise levels of 0.02° √ hr and stability below 0.1° hr, by increasing the area to 4.35 mm2, doubling the rotor voltage, and triplicating the drive displacement. Experiments, however, while matching noise targets, reveal unexpected modal couplings, triggered by softening of high-order modes. This complex mechanism is modelled to explain the observed stability degradation.
Effects of Spurious Modal Coupling on the Stability of Amplitude-Modulated Mode-Split Gyroscopes
C. Viola;M. De Pace;G. Gattere;V. Zega;C. Comi;G. Langfelder
2026-01-01
Abstract
The research discusses progresses and challenges towards the performance improvement of amplitude-modulated (AM) mode-split gyroscopes fabricated in commercial 30-μ m-thick processes. From an existing 2.6 mm2 sensor with 0.1° √hr angle random walk (ARW) and 5-10° hr stability, the new architecture theoretically targets noise levels of 0.02° √ hr and stability below 0.1° hr, by increasing the area to 4.35 mm2, doubling the rotor voltage, and triplicating the drive displacement. Experiments, however, while matching noise targets, reveal unexpected modal couplings, triggered by softening of high-order modes. This complex mechanism is modelled to explain the observed stability degradation.| File | Dimensione | Formato | |
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proceeding_122_MEMS2026_Effects_of_Spurious_Modal_Coupling.pdf
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