High-end MEMS Gyroscopes: Challenges on Mechanical Design

In recent decades, significant advancements have been made in microscale electromechanical systems (MEMS) for sensing and actuation. Standard semiconductor manufacturing techniques have notably reduced both the size and cost of these devices. Additionally, integrating signal processing components with sensing and actuation elements have further minimized system size. Today, MEMS gyroscopes are predominantly employed for stabilization or altitude estimation applications, but efforts are being made to develop high-end devices that may compete with traditional high-end gyroscopes technologies. This work is part of the effort to achieve high-end performances. We will describe the challenges that must be faced, and the simulations necessary to assess these challenges. Then we will analyze the results and propose some ways to optimize a structure.