The introduction of miniaturized piezoresistive sensing into Lissajous frequency modulated gyroscopes has an interesting potential to reduce noise. This letter presents the first design of such a system from both the electro-mechanical and electronics point of view and tests the system in operation. An angle random walk of 3 mdps/√hz is demonstrated, together with a full-scale range that exceeds 2000 dps for a 46 Hz split, thus corresponding to about 20 Hz system bandwidth. Experimental results also show the importance of tracking the mode-split in operation, as this largely correlates with the zero-rate output drift, leading to a stability improvement by almost a factor of 20, down to 1 °/hr.

Combining Lissajous Frequency Modulation With 250 nm Piezoresistive Sensing in MEMS Gyroscope: Theoretical Advantages and Practical Challenges

Gianollo M.;Gadola M.;Bettini G.;Padovani C.;Langfelder G.
2023-01-01

Abstract

The introduction of miniaturized piezoresistive sensing into Lissajous frequency modulated gyroscopes has an interesting potential to reduce noise. This letter presents the first design of such a system from both the electro-mechanical and electronics point of view and tests the system in operation. An angle random walk of 3 mdps/√hz is demonstrated, together with a full-scale range that exceeds 2000 dps for a 46 Hz split, thus corresponding to about 20 Hz system bandwidth. Experimental results also show the importance of tracking the mode-split in operation, as this largely correlates with the zero-rate output drift, leading to a stability improvement by almost a factor of 20, down to 1 °/hr.
2023
angle random walk
frequency modulation
Mechanical sensors
microelectromechanical systems (MEMS) gyroscopes
nano-gauge
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/1260014
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