Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.
Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films
Marmiroli, Benedetta;Cattoni, Andrea;
2022-01-01
Abstract
Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.File in questo prodotto:
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Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films.pdf
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Deep X-Ray Lithography on "Sol-Gel" Processed Noble Metal Mesoarchitectured Films.pdf
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