This work describes the development of a laser instrument for measuring very-short distances with a minimum sensor size. The absolute distance measurement is obtained through a modulated self-mixing interferometer, realized with a lens-less red VCSEL laser. In a range between 2 mm and 5 mm the sensor shows a resolution of 10 μm at 6.6 kHz of acquisition rate. The sensor size is limited to the laser chip and the contacts; therefore, it is applicable also in very demanding applications, such as the diameter measurement of a hole.
Self-mixing laser sensor for short-distances measurement
NORGIA, MICHELE;PALLUDO, ALESSANDRO;CAVEDO, FEDERICO;PESATORI, ALESSANDRO
2016-01-01
Abstract
This work describes the development of a laser instrument for measuring very-short distances with a minimum sensor size. The absolute distance measurement is obtained through a modulated self-mixing interferometer, realized with a lens-less red VCSEL laser. In a range between 2 mm and 5 mm the sensor shows a resolution of 10 μm at 6.6 kHz of acquisition rate. The sensor size is limited to the laser chip and the contacts; therefore, it is applicable also in very demanding applications, such as the diameter measurement of a hole.File in questo prodotto:
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