A novel test-on-wafer technique for the characterization of production processes is reported. The approach relies on Point Reflectors Optical Waveguides to quickly map key optical parameters of the waveguides across the wafer
Point reflector optical waveguides for on-wafer process qualification
MELATI, DANIELE;MORICHETTI, FRANCESCO;MELLONI, ANDREA IVANO
2014-01-01
Abstract
A novel test-on-wafer technique for the characterization of production processes is reported. The approach relies on Point Reflectors Optical Waveguides to quickly map key optical parameters of the waveguides across the waferFile in questo prodotto:
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