A novel test-on-wafer technique for the characterization of production processes is reported. The approach relies on Point Reflectors Optical Waveguides to quickly map key optical parameters of the waveguides across the wafer

Point reflector optical waveguides for on-wafer process qualification

MELATI, DANIELE;MORICHETTI, FRANCESCO;MELLONI, ANDREA IVANO
2014

Abstract

A novel test-on-wafer technique for the characterization of production processes is reported. The approach relies on Point Reflectors Optical Waveguides to quickly map key optical parameters of the waveguides across the wafer
Integrated Photonics Research, Silicon and Nanophotonics 2014 (Optics InfoBase Conference Papers)
9781557527370
9781557527370
Nanophotonics; Optical waveguides; Photonics; Indium Phosphide, Optical parameters; Point reflector; Production process
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/965240
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