To design effective and reliable probe heads, it is crucial to have a deep understanding of the thermoelectro-mechanical coupled behavior of these complex systems. This work aims to investigate the behavior of vertical type microprobes for high-end wafer probing applications in high temperature I high current regimes, by adopting coupled thermo-electrical and structural numerical simulations. Probe electro-thermal heating, probe force degradation and current carrying capability are studied. The results obtained through the modelling framework introduced in this work are successfully compared to experimental data.
Thermo-electrical and structural coupled simulations of buckling beam microprobes in high temperature/high current conditions
BERTARELLI, EMANUELE;COCCHETTI, GIUSEPPE;CORIGLIANO, ALBERTO
2014-01-01
Abstract
To design effective and reliable probe heads, it is crucial to have a deep understanding of the thermoelectro-mechanical coupled behavior of these complex systems. This work aims to investigate the behavior of vertical type microprobes for high-end wafer probing applications in high temperature I high current regimes, by adopting coupled thermo-electrical and structural numerical simulations. Probe electro-thermal heating, probe force degradation and current carrying capability are studied. The results obtained through the modelling framework introduced in this work are successfully compared to experimental data.File in questo prodotto:
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