High Quality Wafer-scale CVD Graphene on Molybdenum Thin Film for Sensing Application

The superb physical properties of graphene make it a material with great potential for sensing applications, including chemical sensors, Hall sensors and pressure sensors. However, its availability on large area substrates and the development of a scalable manufacturing process need to be addressed. In this work we propose wafer-scale, chemical vapour deposition (CVD) of graphene on sputtered thin-films of molybdenum, as alternative to the more commonly used CVD graphene processes based on copper films. The high melting point of Mo, its low thermal expansion, along with its smooth surface, create potentially favourable conditions to produce large area, wrinkle free, high quality graphene. Furthermore, the advantage of Mo, being commonly used in IC and sensor manufacturing environment, makes it an attractive choice for large volume production of sensing devices.