This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA© surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2].

A differential resonant micro accelerometer for out-of-plane measurements

CASPANI, ALESSANDRO;COMI, CLAUDIA;CORIGLIANO, ALBERTO;LANGFELDER, GIACOMO;ZEGA, VALENTINA;
2014

Abstract

This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA© surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2].
EUROSENSORS 2014
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/880755
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