This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA© surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2].

A differential resonant micro accelerometer for out-of-plane measurements

CASPANI, ALESSANDRO;COMI, CLAUDIA;CORIGLIANO, ALBERTO;LANGFELDER, GIACOMO;ZEGA, VALENTINA;
2014-01-01

Abstract

This paper reports the theoretical and experimental characterization of a new z-axis silicon resonant micro accelerometer fabricated by the THELMA© surface micromachining technique, characterized by differential sensing and very small dimensions. The working principle of this device is based on the variation of the electrostatic stiffness of two torsional resonators. This work is a prosecution of the research on resonant accelerometers published in [1,2].
2014
EUROSENSORS 2014
MEMS; resonant accelerometer; torsional resonator
File in questo prodotto:
File Dimensione Formato  
Eurosensors2014-paper.pdf

Accesso riservato

: Altro materiale allegato
Dimensione 365.96 kB
Formato Adobe PDF
365.96 kB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/880755
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 22
  • ???jsp.display-item.citation.isi??? 12
social impact