In this work a numerical approach to deal with the fracture anisotropy of polycrystalline silicon for microsystems is presented. Because of the micro-scale level of interest in nowadays microsytem structures, an heterogeneous continuum is used where fractures are allowed for both trans- and inter-granular in the material, and silicon grain morphology is artificially reconstructed.
Domain decomposition strategies for the simulation of fracture processes in polysilicon microsystems
CONFALONIERI, FEDERICA;CORIGLIANO, ALBERTO;GHISI, ALDO FRANCESCO
2013-01-01
Abstract
In this work a numerical approach to deal with the fracture anisotropy of polycrystalline silicon for microsystems is presented. Because of the micro-scale level of interest in nowadays microsytem structures, an heterogeneous continuum is used where fractures are allowed for both trans- and inter-granular in the material, and silicon grain morphology is artificially reconstructed.File in questo prodotto:
| File | Dimensione | Formato | |
|---|---|---|---|
|
002180022501.pdf
Accesso riservato
:
Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione
414.73 kB
Formato
Adobe PDF
|
414.73 kB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
