An experimental device has been designed and produced with the purpose of investigating the effect of nano-scale interaction forces on the reliability issue related to premature pull-in of uncharged plates, in case of sub-micron gap between them. The results of the tests are compared with theoretical predictions, in order to assess the role played by nano-scale interactions, e.g. parasitic charging, contact and patch potentials, Casimir force. The importance of the result is enhanced by the fact that the experimental device shows the essential features of real-life MEMS/NEMS and is produced using the same technology as standard commercial devices.
Experimental evidence of the effect of nano-scale interaction forces in MEMS/NEMS
ARDITO, RAFFAELE;CORIGLIANO, ALBERTO;FRANGI, ATTILIO ALBERTO
2014-01-01
Abstract
An experimental device has been designed and produced with the purpose of investigating the effect of nano-scale interaction forces on the reliability issue related to premature pull-in of uncharged plates, in case of sub-micron gap between them. The results of the tests are compared with theoretical predictions, in order to assess the role played by nano-scale interactions, e.g. parasitic charging, contact and patch potentials, Casimir force. The importance of the result is enhanced by the fact that the experimental device shows the essential features of real-life MEMS/NEMS and is produced using the same technology as standard commercial devices.File | Dimensione | Formato | |
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