In this work, a domain decomposition technique is proposed to reduce the computational burden of three-dimensional numerical analyses of fracture processes in polycrystalline solids under dynamic loads. The material considered is polysilicon, which is the most widely employed structural material for Micro-Electro-Mechanical Systems (MEMS). The algorithm extends the proposal of Gravouil and Combescure (2001) to fracture processes involving the presence of discrete cracks propagating both inside the sub-domains and across the interfaces between neighbouring sub-domains. The case of brittle or quasi-brittle fracture is addressed by means of a cohesive approach. Alternative choices for the spatial subdivision strategy are compared. Numerical examples concerning known fracture tests are used for validation. Two applications to real MEMS are presented.

A domain decomposition approach for the simulation of fracture phenomena in polycrystalline microsystems

CONFALONIERI, FEDERICA;GHISI, ALDO FRANCESCO;COCCHETTI, GIUSEPPE;CORIGLIANO, ALBERTO
2014

Abstract

In this work, a domain decomposition technique is proposed to reduce the computational burden of three-dimensional numerical analyses of fracture processes in polycrystalline solids under dynamic loads. The material considered is polysilicon, which is the most widely employed structural material for Micro-Electro-Mechanical Systems (MEMS). The algorithm extends the proposal of Gravouil and Combescure (2001) to fracture processes involving the presence of discrete cracks propagating both inside the sub-domains and across the interfaces between neighbouring sub-domains. The case of brittle or quasi-brittle fracture is addressed by means of a cohesive approach. Alternative choices for the spatial subdivision strategy are compared. Numerical examples concerning known fracture tests are used for validation. Two applications to real MEMS are presented.
quasi-brittle fracture; polysilicon; Cohesive crack; MEMS; Domain decomposition
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/849535
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