Recent advances in computational methods for microsystems

An algorithm, which combines the use of Domain Decomposition and Model Order Reduction methods based on Proper Orthogonal Decomposition, is proposed. The algorithm allows for the efficient handling of electro-mechanical coupled problems in MEMS, with a strong reduction of computing time with respect to standard monolithic or staggered solution strategies. Examples of coupled electro-mechanical problems, concerning a vibrating beam subject to variable electrostatic forces, are presented and discussed