To overcome the computational burden associated to the three-dimensional finite element simulation of fracture phenomena in polysilicon MEMS during dynamic loading, like e.g. impacts, a domain decomposition technique is used. The approach extends a method developed for linear elastic materials, by including cohesive crack propagation and it allows for the simulation of inter and trans-granular fracture initiation and propagation in polycrystals and it is a step forward in the construction of a complete simulation tool for the description of fracture phenomena in microsystems. Applications to critical MEMS details show encouraging results in reproducing local failure mechanisms.
A Domain Decomposition Method for the Simulation of Fracture in Polysilicon MEMS
CONFALONIERI, FEDERICA;COCCHETTI, GIUSEPPE;GHISI, ALDO FRANCESCO;CORIGLIANO, ALBERTO
2013-01-01
Abstract
To overcome the computational burden associated to the three-dimensional finite element simulation of fracture phenomena in polysilicon MEMS during dynamic loading, like e.g. impacts, a domain decomposition technique is used. The approach extends a method developed for linear elastic materials, by including cohesive crack propagation and it allows for the simulation of inter and trans-granular fracture initiation and propagation in polycrystals and it is a step forward in the construction of a complete simulation tool for the description of fracture phenomena in microsystems. Applications to critical MEMS details show encouraging results in reproducing local failure mechanisms.| File | Dimensione | Formato | |
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