Coupled electro-mechanical problems are frequently encountered when dealing with micro electro-mechanical systems (MEMS) with capacitive actuation and/or readout systems; their numerical solution can be extremely time consuming, due to the nonlinearity of the coupling terms. Coupled electrostatic – structural dynamic simulations are carried out in this paper through an innovative numerical procedure, based on the use of a domain decomposition technique and of a proper orthogonal decomposition methodology. The approach is assessed through the analysis of the dynamic response of a doubly clamped beam and of a plane resonator subjected to an electrostatic actuation, showing computational gains up to 98%.

Domain decomposition and model order reduction methods applied to the simulation of multiphysics problems in MEMS

CORIGLIANO, ALBERTO;DOSSI, MARTINO;MARIANI, STEFANO
2013

Abstract

Coupled electro-mechanical problems are frequently encountered when dealing with micro electro-mechanical systems (MEMS) with capacitive actuation and/or readout systems; their numerical solution can be extremely time consuming, due to the nonlinearity of the coupling terms. Coupled electrostatic – structural dynamic simulations are carried out in this paper through an innovative numerical procedure, based on the use of a domain decomposition technique and of a proper orthogonal decomposition methodology. The approach is assessed through the analysis of the dynamic response of a doubly clamped beam and of a plane resonator subjected to an electrostatic actuation, showing computational gains up to 98%.
MEMS; electro-mechanical problem; finite element method; domain decomposition; proper orthogonal decomposition
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/762249
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