A CMOS imager that combines single photon sensitivity with photon timing capabilities has been developed for Time-Of-Flight (TOF) measurements and for Time-Correlated Single-Photon Counting (TCSPC) applications. A test structure with 32×4 pixels is presented in this paper. Each pixel is based on a 30 $\mu$m diameter Single-Photon Avalanche Diode (SPAD) with low Dark Counting Rate (60 cps at room temperature) and a Time-to-Digital Converter (TDC) with 400 ps resolution. Some preliminary measurements confirm the possibility to use this SPAD array in a 3D TOF scanning system.
CMOS single photon sensor with in-pixel TDC for Time-of-Flight applications
VILLA, FEDERICA ALBERTA;LUSSANA, RUDI;TAMBORINI, DAVIDE;BRONZI, DANILO;MARKOVIC, BOJAN;TOSI, ALBERTO;ZAPPA, FRANCO;TISA, SIMONE
2013-01-01
Abstract
A CMOS imager that combines single photon sensitivity with photon timing capabilities has been developed for Time-Of-Flight (TOF) measurements and for Time-Correlated Single-Photon Counting (TCSPC) applications. A test structure with 32×4 pixels is presented in this paper. Each pixel is based on a 30 $\mu$m diameter Single-Photon Avalanche Diode (SPAD) with low Dark Counting Rate (60 cps at room temperature) and a Time-to-Digital Converter (TDC) with 400 ps resolution. Some preliminary measurements confirm the possibility to use this SPAD array in a 3D TOF scanning system.File in questo prodotto:
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