The present disclosure relates to an acceleration and angular-velocity resonant detection integrated structure, and to a related sensor device of a so-called MEMS (microlectromechanical system) type
ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE
COMI, CLAUDIA;CORIGLIANO, ALBERTO;
2013-01-01
Abstract
The present disclosure relates to an acceleration and angular-velocity resonant detection integrated structure, and to a related sensor device of a so-called MEMS (microlectromechanical system) typeFile in questo prodotto:
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