The present disclosure relates to an acceleration and angular-velocity resonant detection integrated structure, and to a related sensor device of a so-called MEMS (microlectromechanical system) type
Titolo: | ACCELERATION AND ANGULAR VELOCITY RESONANT DETECTION INTEGRATED STRUCTURE, AND RELATED MEMS SENSOR DEVICE | |
Autori: | ||
Data di pubblicazione: | 2013 | |
Abstract: | The present disclosure relates to an acceleration and angular-velocity resonant detection integrated structure, and to a related sensor device of a so-called MEMS (microlectromechanical system) type | |
Handle: | http://hdl.handle.net/11311/758902 | |
Appare nelle tipologie: | 05.1 Brevetto |
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