A multi-physics model for a beam subject to current flow in a magnetic field is proposed which takes into account thermal and non-linear geometrical effects. The model is applied to the study of a Lorentz-force MEMS magnetometer. A topology optimization algorithm in which geometrical parameters of the beam subject to Lorentz force are considered optimization variables is proposed and discussed.

Optimal Design of a Resonating MEMS Magnetometer: a Multi-Physics Approach

CORIGLIANO, ALBERTO;BAGHERINIA, MEHRDAD;BRUGGI, MATTEO;MARIANI, STEFANO;
2013-01-01

Abstract

A multi-physics model for a beam subject to current flow in a magnetic field is proposed which takes into account thermal and non-linear geometrical effects. The model is applied to the study of a Lorentz-force MEMS magnetometer. A topology optimization algorithm in which geometrical parameters of the beam subject to Lorentz force are considered optimization variables is proposed and discussed.
2013
Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2013 14th International Conference on
9781467361385
MEMS; magnetometer; multi-physics; optimization
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/758517
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