A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated. The sensing principle is based on the variation of the electrostatic stiffness of two torsional resonators mechanically coupled with an inertial proof mass. The accelerometer, fabricated by the ThELMA® surface micro-machining process of STMicroelectronics, constitutes a further step of a research focussing on the design of in-plane and out-of-plane resonant micro accelerometers. Preliminary electrostatic measures of the torsional resonators response.

A resonant micro accelerometer based on electrostatic stiffness variation

COMI, CLAUDIA;CORIGLIANO, ALBERTO;GHISI, ALDO FRANCESCO;
2013

Abstract

A new out-of-plane resonant micro-machined accelerometer has been designed, modelled and fabricated. The sensing principle is based on the variation of the electrostatic stiffness of two torsional resonators mechanically coupled with an inertial proof mass. The accelerometer, fabricated by the ThELMA® surface micro-machining process of STMicroelectronics, constitutes a further step of a research focussing on the design of in-plane and out-of-plane resonant micro accelerometers. Preliminary electrostatic measures of the torsional resonators response.
MEMS · Resonant accelerometer · Electrostatic stiffness · Out-of plane sensing · Pull-in instability
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/747167
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