We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.
On the optimization of piezoelectrically actuated MEMS resonators
FRANGI, ATTILIO ALBERTO;CREMONESI, MASSIMILIANO;
2012-01-01
Abstract
We address the numerical analysis of piezo MEMS square extensional resonators and show that interfacial losses are dominant. These are formulated in terms of the stress jump across the interface yielding a viscous type of dissipation. The model developed is then employed to perform an optimization of the pattern of the piezo-layer so as to excite selected mechanical modes.File in questo prodotto:
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