In this paper, a domain decomposition approach is proposed to efficiently address the finite element simulation of fracture phenomena in polysilicon MEMS under impact dynamics. The analysis is performed at the microscale, i.e. at the level of the microstructural parts composing the microsystem, in order to simulate local failure mechanisms developing in critical regions.
A Domain Decomposition Method for the Simulation of Fracture in Polysilicon MEMS
CONFALONIERI, FEDERICA;COCCHETTI, GIUSEPPE;GHISI, ALDO FRANCESCO;CORIGLIANO, ALBERTO
2012-01-01
Abstract
In this paper, a domain decomposition approach is proposed to efficiently address the finite element simulation of fracture phenomena in polysilicon MEMS under impact dynamics. The analysis is performed at the microscale, i.e. at the level of the microstructural parts composing the microsystem, in order to simulate local failure mechanisms developing in critical regions.File in questo prodotto:
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Confalonieri-Cocchetti-Ghisi-Corigliano-EuroSime2012-paper092.pdf
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