Providing an estimate of gas damping in MEMS is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. This issue is here addressed, focusing on high pressure applications, by means of integral equations and fast solvers implementing a linear incompressible Stokes formulation with slip boundary conditions. Numerical results are validated with experimental data. Extensions to high working frequencies and low pressures are discussed.
Fast Stokes Solvers for MEMS
FRANGI, ATTILIO ALBERTO
2012-01-01
Abstract
Providing an estimate of gas damping in MEMS is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. This issue is here addressed, focusing on high pressure applications, by means of integral equations and fast solvers implementing a linear incompressible Stokes formulation with slip boundary conditions. Numerical results are validated with experimental data. Extensions to high working frequencies and low pressures are discussed.File in questo prodotto:
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