Fast Stokes Solvers for MEMS

Providing an estimate of gas damping in MEMS is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. This issue is here addressed, focusing on high pressure applications, by means of integral equations and fast solvers implementing a linear incompressible Stokes formulation with slip boundary conditions. Numerical results are validated with experimental data. Extensions to high working frequencies and low pressures are discussed.