Exploiting Photosensitive As2S3 Chalcogenide Glass in Photonic Integrated Circuits

In this contribution we present a new and efficient technique for post-fabrication trimming of chalcogenide (ChG) based photonic integrated circuits (PICs). The technique exploits the high photosensitivity of As2S3 glass to visible light radiation in order to induce a variation in the refractive index of the material, and therefore in the optical properties of ChG-based devices. The trimming technique enables not only to compensate for fabrication tolerances and restore desired functionalities, but also to provide a tool for the reconfiguration of photonic circuits. We demonstrate the trimming of PICs employing As2S3 core waveguides and As2S3-assisted silicon waveguides. Finally, to further show the wide versatility of this approach, we apply the technique to trim the response of As3S3 silicon waveguides covered with an additional polymer cladding layer, demonstrating simultaneous athermal operation and trimming functionality.