We show the potential of post-fabrication trimming of integrated devices by exploiting photosensitivity in chalcogenide glass. Compensation of fabrication tolerances is demonstrated in As2S3 and As2S3-assisted silicon ring filters.
Exploiting photosensitivity in chalcogenide-assisted integrated optics
MELLONI, ANDREA IVANO;CANCIAMILLA, ANTONIO;FERRARI, CARLO;GRILLANDA, STEFANO;MORICHETTI, FRANCESCO;
2011-01-01
Abstract
We show the potential of post-fabrication trimming of integrated devices by exploiting photosensitivity in chalcogenide glass. Compensation of fabrication tolerances is demonstrated in As2S3 and As2S3-assisted silicon ring filters.File in questo prodotto:
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