The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.

Reduced Order Modelling of MEMS Dynamics

MARIANI, STEFANO;EFTEKHAR AZAM, SAEED;GHISI, ALDO FRANCESCO;CORIGLIANO, ALBERTO;
2011-01-01

Abstract

The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.
2011
DTIP 2011, Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS
9782355000133
MEMS; dynamics; reduced order modelling
File in questo prodotto:
File Dimensione Formato  
dtip11-30_published.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 2.56 MB
Formato Adobe PDF
2.56 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/632650
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 3
  • ???jsp.display-item.citation.isi??? ND
social impact