The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.
Reduced Order Modelling of MEMS Dynamics
MARIANI, STEFANO;EFTEKHAR AZAM, SAEED;GHISI, ALDO FRANCESCO;CORIGLIANO, ALBERTO;
2011-01-01
Abstract
The dynamics of a uniaxial micro-accelerometer subjected to accidental drop events is studied by means of a reduced order model. A two degrees of freedom model is built, which carefully reproduces the MEMS response under high acceleration events. The results of the reduced order model are compared to those obtained with a three-dimensional finite element model, in terms of accuracy of the results and simulation speed-up.File in questo prodotto:
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