In this paper, mechanical and electrical nonlinearities of MEMS resonators are discussed and their influence on the resonant sensing performance is analyzed. An “L-shaped” resonator is proposed in order to reduce the influence of the nonlinear mechanical term on the global response with respect to the more standard clamped-clamped (“I-shaped”) resonator. An extended linear behavior of the “L-shaped” resonator is analytically demonstrated and validated through experimental results. As a consequence, the proposed resonator can be driven to larger vibration amplitudes through higher actuation voltages, allowing better signal-to-noise ratio (SNR).

Enhancing the linear range of MEMS resonators for sensing applications

TOCCHIO, ALESSANDRO;COMI, CLAUDIA;LANGFELDER, GIACOMO;CORIGLIANO, ALBERTO;LONGONI, ANTONIO FRANCESCO
2011

Abstract

In this paper, mechanical and electrical nonlinearities of MEMS resonators are discussed and their influence on the resonant sensing performance is analyzed. An “L-shaped” resonator is proposed in order to reduce the influence of the nonlinear mechanical term on the global response with respect to the more standard clamped-clamped (“I-shaped”) resonator. An extended linear behavior of the “L-shaped” resonator is analytically demonstrated and validated through experimental results. As a consequence, the proposed resonator can be driven to larger vibration amplitudes through higher actuation voltages, allowing better signal-to-noise ratio (SNR).
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/608682
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