This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geometrical setting is optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. The accelerometer, fabricated by the THELMA surface micro-machining process of STMicroelectronics, constitutes a further step of a research leading to the design of in-plane and out-of-plane resonant micro accelerometers.

A new out-of-plane resonant micro accelerometer

COMI, CLAUDIA;CORIGLIANO, ALBERTO;
2011

Abstract

This paper reports a new design of an out-of-plane resonant micro-machined accelerometer. The geometrical setting is optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. The accelerometer, fabricated by the THELMA surface micro-machining process of STMicroelectronics, constitutes a further step of a research leading to the design of in-plane and out-of-plane resonant micro accelerometers.
Atti XX Congresso dell’Associazione Italiana di Meccanica Teorica e Applicata – AIMETA2011
9788890634017
MEMS; resonant accelerometer; out-of plane sensing; high sensitivity
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/604884
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