Improvements in self calibration methodologies for high precision machines

Sensors with resolution up to few picometers are currently available. However, this performance cannot be completely exploited in 2D and 3D geometric measurement because of inaccuracy of measuring machines, which generates measurement errors at least three order of magnitude greater. But a relevant part of these errors is systematic: if a systematic error map can be identified, it could be compensated. In this work a methodology for dealing with very small scale systematic errors is introduced, which solves some problems in the application of classical self-calibration techniques.