This work deals with the mechanical response of circular microplates undergoing electrostatic actuation. A one degree-of-freedom model and Finite Element approaches are exploited in a nondimensional framework. First, a quasi-static conventional approach is adopted. From the one degree-of-freedom model a closed form solution for the plate electromechanical problem is obtained for the first time. Then a strong attention is paid to pull-in phenomena in nonlinear dynamics. Dynamic behavior of the structure is explored, leading to the identification of a pull-in loading condition which is dependent on the quality factor Q. The outcomes are discussed and widely compared with those available in the literature for similar microsystems.

A plate model for the evaluation of pull-in instability occurrence in electrostatic micropump diaphragm

BERTARELLI, EMANUELE;ARDITO, RAFFAELE;CORIGLIANO, ALBERTO;CONTRO, ROBERTO
2011

Abstract

This work deals with the mechanical response of circular microplates undergoing electrostatic actuation. A one degree-of-freedom model and Finite Element approaches are exploited in a nondimensional framework. First, a quasi-static conventional approach is adopted. From the one degree-of-freedom model a closed form solution for the plate electromechanical problem is obtained for the first time. Then a strong attention is paid to pull-in phenomena in nonlinear dynamics. Dynamic behavior of the structure is explored, leading to the identification of a pull-in loading condition which is dependent on the quality factor Q. The outcomes are discussed and widely compared with those available in the literature for similar microsystems.
MEMS; micropump; electromechanical coupling; dynamic pull-in; Q factor.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/581071
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