On the nonlinear behaviour of MEMS resonators

This work is focussed on the nonlinear dynamic response of electrostatically actuated micro-resonators. A single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of microresonators. An analytical model, based on the Hamilton’s principle, accounting for mechanical and electrical nonlinearities is derived. The analytical prediction is compared with experimental measurements obtained on a L-shaped micro-resonator.