A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. Experimental results demonstrate a differential sensitivity of 201 Hz/g around a resonance frequency of 84 kHz.
A NEW BIAXIAL SILICON RESONANT MICRO ACCELEROMETER
COMI, CLAUDIA;CORIGLIANO, ALBERTO;LANGFELDER, GIACOMO;LONGONI, ANTONIO FRANCESCO;TOCCHIO, ALESSANDRO;
2011-01-01
Abstract
A new biaxial silicon resonant accelerometer characterized by a high sensitivity and a low cross-axis sensitivity is presented in this paper. The device allows for the simultaneous measure of acceleration acting along two different axes using two couples of resonating slender beams linked to two couples of flexible beams and to a proof mass. Experimental results demonstrate a differential sensitivity of 201 Hz/g around a resonance frequency of 84 kHz.File in questo prodotto:
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