In this paper the mechanical response of circular micro-plates undergoing electrostatic actuation is investigated. A reduced order model and finite element approaches are exploited in a non-dimensional framework. First, a quasi-static conventional approach is adopted, then attention is focused on pull-in phenomena in non-linear dynamics. A relation between pull-in loading condition and quality factor Q is suggested. The analysis of the device is completed by the consideration of adhesion energy between the plate and the substrate. This study is essential in order to evaluate the so-called “stiction” of the plate and its release after capacitor deactivation.

Static and dynamic analyses of actuation devices in electrostatic micro-pumps

ARDITO, RAFFAELE;BERTARELLI, EMANUELE;CONTRO, ROBERTO;CORIGLIANO, ALBERTO
2010

Abstract

In this paper the mechanical response of circular micro-plates undergoing electrostatic actuation is investigated. A reduced order model and finite element approaches are exploited in a non-dimensional framework. First, a quasi-static conventional approach is adopted, then attention is focused on pull-in phenomena in non-linear dynamics. A relation between pull-in loading condition and quality factor Q is suggested. The analysis of the device is completed by the consideration of adhesion energy between the plate and the substrate. This study is essential in order to evaluate the so-called “stiction” of the plate and its release after capacitor deactivation.
File in questo prodotto:
File Dimensione Formato  
Paper.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 805.62 kB
Formato Adobe PDF
805.62 kB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/574908
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 2
  • ???jsp.display-item.citation.isi??? 2
social impact