Static and dynamic analyses of actuation devices in electrostatic micro-pumps

In this paper the mechanical response of circular micro-plates undergoing electrostatic actuation is investigated. A reduced order model and finite element approaches are exploited in a non-dimensional framework. First, a quasi-static conventional approach is adopted, then attention is focused on pull-in phenomena in non-linear dynamics. A relation between pull-in loading condition and quality factor Q is suggested. The analysis of the device is completed by the consideration of adhesion energy between the plate and the substrate. This study is essential in order to evaluate the so-called “stiction” of the plate and its release after capacitor deactivation.