A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is presented. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor. The high level of sensitivity is obtained at relatively low quality factors and keeping the dimensions very small, thanks to an innovative and optimized geometrical design of the device. The proposed accelerometer has been fabricated and the first experimental measurements are presented in the paper.

A high sensitivity uniaxial resonant accelerometer

COMI, CLAUDIA;CORIGLIANO, ALBERTO;LANGFELDER, GIACOMO;LONGONI, ANTONIO FRANCESCO;TOCCHIO, ALESSANDRO;
2010

Abstract

A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is presented. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor. The high level of sensitivity is obtained at relatively low quality factors and keeping the dimensions very small, thanks to an innovative and optimized geometrical design of the device. The proposed accelerometer has been fabricated and the first experimental measurements are presented in the paper.
Resonant accelerometers; oscillating circuit; MEMS; sezele
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/572571
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