A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented. The device’s working principle is based on the frequency variations of two resonating beams coupled to a proof mass. Under an external acceleration, the movement of the proof mass causes an axial load on the beams, generating opposite stiffness variations, which in turn result in a differential separation of their resonance frequencies. A high level of sensitivity is obtained thanks to an innovative and optimized geometrical design of the device that guarantees a great amplification of the axial loads. The acceleration measure is obtained thanks to a properly designed oscillating circuit. In agreement with the theoretical prediction, the experimental results show a sensitivity of 455 Hz/g (g being the gravity acceleration) with resonant frequency of about 58 kHz and a good linearity in the range of interest.

A resonant microaccelerometer with high sensitivity operating in an oscillating circuit.

COMI, CLAUDIA;CORIGLIANO, ALBERTO;LANGFELDER, GIACOMO;LONGONI, ANTONIO FRANCESCO;TOCCHIO, ALESSANDRO;
2010

Abstract

A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity and very small dimensions is presented. The device’s working principle is based on the frequency variations of two resonating beams coupled to a proof mass. Under an external acceleration, the movement of the proof mass causes an axial load on the beams, generating opposite stiffness variations, which in turn result in a differential separation of their resonance frequencies. A high level of sensitivity is obtained thanks to an innovative and optimized geometrical design of the device that guarantees a great amplification of the axial loads. The acceleration measure is obtained thanks to a properly designed oscillating circuit. In agreement with the theoretical prediction, the experimental results show a sensitivity of 455 Hz/g (g being the gravity acceleration) with resonant frequency of about 58 kHz and a good linearity in the range of interest.
Resonant accelerometers; oscillating circuit; high sensitivity; mems; sezele
File in questo prodotto:
File Dimensione Formato  
05570853-published.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 1.85 MB
Formato Adobe PDF
1.85 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/572334
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 142
  • ???jsp.display-item.citation.isi??? 112
social impact