A multi-physics framework for the geometric optimization of a diaphragm electrostatic micropump

In this work, an electrostatic diaphragm micropump is investigated by means of COMSOL Multiphysics 3.5. Due to the complexity of the device, results are obtained stepwise, performing preliminary analyses with simplified models and then by gradually introducing the different physics involved. A fluid-dynamic model is adopted to evaluate the fluid flow characteristics inside the pumping chamber, in static conditions. In parallel, electro-mechanical quasi-static simulations are performed to evaluate the occurrence of membrane movement and pull-in phenomena. Finally, a simplified fully-coupled electrostatic-fluid-structure dynamic model is proposed, with the aim of appreciate the device performance in a true multi-physic and time-dependent framework. The final goal of this research activity is the design of an innovative device, which enables proper fluid actuation at low voltage. The task at this stage is the definition of a numerical design approach to optimize the device geometry and actuation, enabling a proper fluid transport. This is intended to support future design process and prototype realization.