The analysis of fluid damping in micro-electro-mechanical systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results.
On the evaluation of damping in MEMS in the slip-flow regime
FRANGI, ATTILIO ALBERTO;
2006-01-01
Abstract
The analysis of fluid damping in micro-electro-mechanical systems (MEMS) is addressed. A mixed fast multipole boundary element method based on both velocity and traction integral equations is employed and adapted in order to account for slip boundary conditions. The formulation presented is applied to the analysis of a biaxial accelerometer and validated with experimental results.File in questo prodotto:
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