A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.
Kinetic approach to gas flows in microchannels
LORENZANI, SILVIA;GIBELLI, LIVIO;FREZZOTTI, ALDO;FRANGI, ATTILIO ALBERTO;CERCIGNANI, CARLO
2007-01-01
Abstract
A two-dimensional linearized Bhatnagar, Gross, and Krook (BGK) model for the Boltzmann equation has been used to evaluate the damping forces exerted by a gas on the moving surfaces of a micromechanical structure. A very good agreement has been found between our numerical results and the experimental data collected on a silicon biaxial accelerometer in the transitional flow regime. Furthermore, it has been shown that the one-dimensional Reynolds equation fails to predict the squeeze film damping in the two-dimensional structures typical of real MEMS.File in questo prodotto:
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