An electrostatic micropump is investigated by means of computational techniques. Results are obtained stepwise, by gradually introducing in the model the different physics involved. Electro-mechanical static simulations are performed to evaluate the occurrence of membrane movement and pull-in phenomena. Then, a fully-coupled electrostatic-fluidstructure dynamic model is proposed, with the aim of appreciate the device performances in a multi-physic framework. Device fabrication guidelines are also presented.

Numerical analysis for design optimization of an electrostatic pump.

BERTARELLI, EMANUELE;ARDITO, RAFFAELE;CIOFFI, MARGHERITA;LAGANA', KATIA;CORIGLIANO, ALBERTO;CONTRO, ROBERTO;DUBINI, GABRIELE ANGELO
2009

Abstract

An electrostatic micropump is investigated by means of computational techniques. Results are obtained stepwise, by gradually introducing in the model the different physics involved. Electro-mechanical static simulations are performed to evaluate the occurrence of membrane movement and pull-in phenomena. Then, a fully-coupled electrostatic-fluidstructure dynamic model is proposed, with the aim of appreciate the device performances in a multi-physic framework. Device fabrication guidelines are also presented.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11311/547155
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