We present a multi-scale finite element approach to simulate the effects of shocks on polysilicon MEMS sensors. We show how the crystal structure of the polysilicon film can be handled at the micro-scale to get insights into possible failure scenarios.
Failure analysis of polysilicon mems sensors exposed to shocks
MARIANI, STEFANO;GHISI, ALDO FRANCESCO;CORIGLIANO, ALBERTO;
2008-01-01
Abstract
We present a multi-scale finite element approach to simulate the effects of shocks on polysilicon MEMS sensors. We show how the crystal structure of the polysilicon film can be handled at the micro-scale to get insights into possible failure scenarios.File in questo prodotto:
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