A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. A small-amplitude, high-frequency voltage signal is applied between themovable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device. Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained

Low-noise real-time measurements of the position of movable structures in MEMS

LANGFELDER, GIACOMO;LONGONI, ANTONIO FRANCESCO;ZARAGA, FEDERICO
2008-01-01

Abstract

A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. A small-amplitude, high-frequency voltage signal is applied between themovable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device. Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained
2008
sezele
File in questo prodotto:
File Dimensione Formato  
Low-noise.pdf

Accesso riservato

: Post-Print (DRAFT o Author’s Accepted Manuscript-AAM)
Dimensione 882.95 kB
Formato Adobe PDF
882.95 kB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/546676
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact