A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. A small-amplitude, high-frequency voltage signal is applied between themovable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device. Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained

Low-noise real-time measurements of the position of movable structures in MEMS

LANGFELDER, GIACOMO;LONGONI, ANTONIO FRANCESCO;ZARAGA, FEDERICO
2008-01-01

Abstract

A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described. A small-amplitude, high-frequency voltage signal is applied between themovable and fixed plates of the sensing capacitance. The resulting current is modulated by the external forces applied to the structure. This high-frequency-shift makes it possible to filter low-noise contributes and minimize readout electrostatic perturbations on the device. Experimental results are reported for a comb-type MEMS test structure with quasi-static, sinusoidal, and impulsive forces. Resolution and long-term stability of nanometric values have been obtained
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/546676
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