The effect of coatings and superficial oxide on the behavior of micro resonators deserves attention in view of its impact on real-life devices. To this purpose, in this work we focus on the thermoelastic damping in layered thin resonating beams. Including the effect of thermally imperfect interfaces, the quality factor is analytically computed. The results obtained are discussed and compared with available data.
Thermoelastic damping in layered micromechanical resonators
ARDITO, RAFFAELE;COMI, CLAUDIA
2009-01-01
Abstract
The effect of coatings and superficial oxide on the behavior of micro resonators deserves attention in view of its impact on real-life devices. To this purpose, in this work we focus on the thermoelastic damping in layered thin resonating beams. Including the effect of thermally imperfect interfaces, the quality factor is analytically computed. The results obtained are discussed and compared with available data.File in questo prodotto:
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