The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. Coupled finite element simulations of the electromechanical behavior have been performed to predict the functioning of the device. The proposed accelerometer has been fabricated and on-chip measurements are currently in progress.
A surface micromachined resonant accelerometer with high resolution
COMI, CLAUDIA;CORIGLIANO, ALBERTO;
2009-01-01
Abstract
The paper reports a new design of a resonant micro-machined accelerometer. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor while keeping its dimensions very small. Coupled finite element simulations of the electromechanical behavior have been performed to predict the functioning of the device. The proposed accelerometer has been fabricated and on-chip measurements are currently in progress.File in questo prodotto:
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