The paper analyzes the nonlinear dynamic response of microresonators. A simple physical model of a single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of microresonators. An analytical model, based on the Hamilton's principle, accounting for large displacements is presented and validated thanks to numerical finite element analyses. In order to widen the linear operation range of the device an optimal geometry of the resonator is proposed.

On geometrical effects in micro-resonators

COMI, CLAUDIA
2009-01-01

Abstract

The paper analyzes the nonlinear dynamic response of microresonators. A simple physical model of a single span beam axially constrained at both end, possibly with elastic constraints, is considered as representative of different common layout of microresonators. An analytical model, based on the Hamilton's principle, accounting for large displacements is presented and validated thanks to numerical finite element analyses. In order to widen the linear operation range of the device an optimal geometry of the resonator is proposed.
2009
MEMS; microresonator; nonlinear dynamics
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/545612
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