Two-dimensional periodic arrays of submicrometric holes are implemented by means of multiple-exposure optical holography in a photoresist sensitive to the standard emission line (476 nm) of Argon laser. SEM acquisitions and diffractive characterizations at 1550 nm show the lattice quality and its capability to operate as fan-out optical device.
Holographic bidimensional periodic structures in broadband-sensitive photoresist
BOFFI, PIERPAOLO;MARTINELLI, MARIO
2003-01-01
Abstract
Two-dimensional periodic arrays of submicrometric holes are implemented by means of multiple-exposure optical holography in a photoresist sensitive to the standard emission line (476 nm) of Argon laser. SEM acquisitions and diffractive characterizations at 1550 nm show the lattice quality and its capability to operate as fan-out optical device.File in questo prodotto:
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