COMPUTATIONAL FLUID DYNAMIC MODEL OF A TAPERED HOLWECK VACUUM PUMP OPERATING IN THE VISCOUS AND TRANSITION REGIMES. PART I: VACUUM PERFORMANCE

Holweck molecular drag pumps are used as high-pressure stages in hybrid turbomolecular vacuum pumps, where they can operate in the transition and the viscous regime. In this article we develop a Navier-Stokes model of a Holweck pump with tapered pumping channels, applying slip-flow boundary conditions, to predict vacuum performances with and without gas flow. The commercial computational fluid dynamic code FLUENT is used to solve the model equations and to predict the pressure profile along the grooves. A specifically designed experiment is presented, whose arrangement provides the boundary conditions as input to the model and whose results are used to validate it.