The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.

Metallization and nanostructuring of semiconductor surfaces by galvanic displacement processes

MAGAGNIN, LUCA;
2007-01-01

Abstract

The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.
2007
Galvanic deposition; Metalization; Semiconductor surfaces; Electrodeposition; Electroless deposition
File in questo prodotto:
File Dimensione Formato  
Surface Science Reports_62_2007.pdf

Accesso riservato

: Altro materiale allegato
Dimensione 3.98 MB
Formato Adobe PDF
3.98 MB Adobe PDF   Visualizza/Apri

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11311/523662
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus 159
  • ???jsp.display-item.citation.isi??? ND
social impact