The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh.The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified threelevel, global–local, multi scale approach.
Numerical simulation of impact-induced rupture in polysilicon MEMS
CORIGLIANO, ALBERTO;FRANGI, ATTILIO ALBERTO;
2008-01-01
Abstract
The problem of impact rupture in polysilicon MEMS is addressed in this paper employing a numerical 2D geometrical model for the polycrystal obtained by means of a Voronoi tessellation coupled with a Finite Element (FE) mesh.The intergranular and transgranular rupture is modelled by means of cohesive traction-jumps softening laws; accidental drop is simulated through a simplified threelevel, global–local, multi scale approach.File in questo prodotto:
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